How to reduce chamber particle contamination on a Lam Research Kiyo / Vector / Versys
Particle excursions are usually a polymer flaking event after missed chamber conditioning, a worn focus ring, or an o-ring shedding particles. Condition the chamber and inspect the focus ring.
~90 min7 steps
How to fix etch rate non-uniformity on a Lam Research Kiyo / Vector / Versys plasma etch system
Etch non-uniformity is usually a dirty or eroded upper electrode, an RF match detuning, or a gas distribution change. Run a blanket film etch and map the result before changing any parameter.
~120 min8 steps
How to troubleshoot plasma ignition failure on a Lam Research Kiyo / Vector / Versys
Ignition failures are most often a process gas interlock, an RF generator fault, or a match network impedance mismatch at low pressure. Check the gas interlocks and RF power delivery first.
~45 min7 steps