TL;DR
Ignition failures are most often a process gas interlock, an RF generator fault, or a match network impedance mismatch at low pressure. Check the gas interlocks and RF power delivery first.
What you might see
- plasma ignition timeout alarm
- reflected RF power high at ignition
- gas flow confirmed but no plasma light
- ignition succeeds occasionally then fails again
Likely causes
Process gas interlock not satisfied due to MFC not reaching set-point before ignition timeout
RF generator output power fault or internal component failure
Match network capacitor position requiring a new ignition offset
Residual chamber pressure too high from previous run, preventing stable plasma formation
Required tools
- System controller fault log access
- RF power meter
- MFC diagnostic screen
- Vacuum pressure gauge
Safety first
- Plasma systems operate with high RF power. Do not touch the RF feed-through or match network components while the RF generator is enabled.
- Process gases may be toxic or corrosive. Confirm the gas-safe status before opening any gas panel door.
Procedure
- 1
Review the fault log on the system controller and identify whether the ignition fault is on the source RF, bias RF, or a gas flow interlock.
- 2
Confirm all process gas MFCs are at their ignition set-points before the ignition command is issued. A slow-responding MFC can trip the interlock.[1]
- 3
Check the RF generator output power reading on the ignition attempt. Zero or very low output power indicates a generator fault.
- 4
Verify the chamber base pressure is at or below the ignition pressure threshold. If the foreline pump or turbo pump has a fault, the chamber may be at too high a pressure.
- 5
Adjust the RF match network ignition position offset if the system allows manual ignition position entry. A small change (a few percent) can help strike plasma.[1]
- 6
Inspect the RF cable and connectors between the generator, match, and electrode for damage or loose connections.
- 7
If the ignition failure persists, run the match network self-calibration routine and re-attempt.
Sources
Lam Research Lam Kiyo / Vector / Versys Plasma Etch System general technical documentation, Lam Research
Lam Research plasma etch system general ignition procedure and RF diagnostics (general)
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