How to fix focus and critical dimension shift on an ASML PAS 5500 / NXT 1980 / Twinscan NXE EUV
CD shift is most often a focus offset drift or a dose calibration error. Run a focus-exposure matrix and compare to the process baseline before adjusting any parameter.
~120 min8 steps
How to fix overlay error out of spec on an ASML PAS 5500 / NXT 1980 / Twinscan NXE EUV
Overlay errors usually come from alignment model drift, chuck temperature change, or lens heating. Run a standard overlay measurement lot and re-optimize the alignment model.
~90 min7 steps
How to clear a reticle handling fault on an ASML PAS 5500 / NXT 1980 / Twinscan NXE EUV
Reticle handling faults are most often caused by a reticle misidentification, a SMIF pod loading error, or a gripper vacuum fault. Check the pod barcode and gripper vacuum before attempting recovery.
~45 min8 steps