How to troubleshoot deposition rate drop on an Applied Materials Endura / Centura
A falling deposition rate usually means depleted precursor source, MFC drift, or reduced RF power delivery. Check source levels and run an RF match diagnostic first.
~60 min6 steps
How to fix film thickness uniformity drift on an Applied Materials Endura / Centura
Uniformity drift is usually a dirty showerhead, a depleted target, or a gas flow calibration error. Run a process monitor wafer and check the MFC calibrations first.
~120 min8 steps
How to diagnose process chamber vacuum loss on an Applied Materials Endura / Centura
Vacuum loss is most often a failed o-ring, a leaking gate valve, or a saturated cold trap. Perform a base-pressure rate-of-rise test to locate the leak.
~90 min9 steps